The full name of MEMS is the Micro-Electro Mechanical System. Compared to traditional machines, they are smaller in size, and the largest one is not more than one centimeter or even just a few micrometers, and its thickness is even smaller. Silicon-based materials have excellent electrical properties. The strength, hardness, and Young's modulus of silicon materials are comparable to those of iron. The density is similar to that of aluminum, and the thermal conductivity is close to that of molybdenum and tungsten. Using a generation technology similar to that of an integrated circuit (IC), a large number of mature technologies and processes in IC production can be used to produce large-scale, low-cost production, and the cost performance can be greatly improved compared to the conventional “mechanical” manufacturing technology.

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Micro-electro-mechanical systems are micro-devices or systems that can be mass-produced, with micro-mechanisms, micro-sensors, micro-actuators, and signal processing and control circuits, up to interface, communication, and power. You can think of it as using traditional semiconductor processes and materials, using micron technology to make micromachines on the chip, and integrate it with the corresponding circuit as a whole technology. So it is an advanced manufacturing technology platform based on semiconductor manufacturing technology.

MEMS sensor classification:

There are many kinds of MEMS sensors and there are many classification methods. The following are classified according to the working principle as follows:

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Each of these MEMS sensors has a variety of subdivision methods. Such as the accelerometer, according to the detection of the quality of the movement of the classification, angular vibration and line vibration accelerometer, etc., a wide range of common MEMS sensors are pressure sensors, acceleration sensors, micro-machined gyroscopes, inertial sensors, MEMS silicon microphones, etc. Etc.; MEMS sensors are available in many varieties, and there are many parameters between different MEMS, there is no completely standard process. This industry characteristic makes MEMS sensor manufacturing companies invest too much in previous research and development, and sales of single products are difficult to increase. Taking inertial sensors as an example, the market's profit and loss balance is 10 million per month, that is, enterprises must produce at least 10 million inertial sensors per month to maintain a state of no loss. According to the survey, the vast majority of domestic enterprises are much lower than this. scale. The largest pure MEMS sensor company in the country, the United States and New Zealand, is currently losing money. Therefore, the bigger the company is, the greater its profitability will be.

MEMS sensor applications:

As a key device for obtaining information, MEMS sensors play an important role in the miniaturization of various sensing devices. They have been used in space satellites, launch vehicles, aerospace equipment, aircraft, various vehicles, health specialties and consumer electronics products. Has been widely used in other fields. MEMS sensors are typically used as shown below.

On smartphones, MEMS sensors provide a wide range of applications in sound performance, scene switching, gesture recognition, orientation, and temperature/pressure/humidity sensors; in automobiles, MEMS sensors rely on airbag impact sensors, tire pressure monitoring systems (TPMS). ) and vehicle stability control enhance the vehicle's performance. In the medical field, MEMS sensors have been successfully developed to produce miniature insulin syringe pumps, and heart bypass grafts and artificial cell tissues have become practically available therapeutic methods. In wearable applications, MEMS sensors can achieve motion tracking and heart rate Measurements, etc.

MEMS sensor typical application example:

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With the development of electronic technology, the application of MEMS has become more and more widespread, from the earliest industrial and military aviation applications to the general consumer market. Military and aviation belong to the so-called high-value MEMS applications. However, the usage of these two fields is too small, about 40 million US dollars a year, and the space for growth is also limited. The value of MEMS devices in medical electronics is also good. The average selling price of its sensors is much higher than other comparable MEMS fields. Overall, the operating income of a high-value MEMS industry in a year will reach about 300 million U.S. dollars. However, the most widely used ones belong to the automotive electronics and consumer electronics applications market. These two areas account for more than 60% of the MEMS sensor market. We analyze the two main application areas below.

Automotive Electronic MEMS Sensors:

The automotive electronics industry is considered to be the culmination of the first wave of MEMS sensor applications. The rapid development of MEMS sensors in automobiles is mainly due to the comprehensive introduction of automobile safety regulations by various governments (such as requiring all cars to adopt TPMS systems) and automotive intelligence. The trend of development. The average global vehicle contains 10 sensors. In premium cars, about 25 to 40 MEMS sensors are used. The better the car, the more MEMS are used. There are more than 70 MEMS on the BMW 740i car. MEMS sensors can meet the demanding automotive environment, high reliability, accuracy, and low cost requirements. Its application direction and market requirements include vehicle anti-lock braking system (ABS), electronic body stabilization program (ESP), electronically controlled suspension (ECS), electric hand brake (EPB), ramp start assist (HAS), tire pressure monitoring (EPMS) ), engine image stabilization, vehicle inclination measurement, and heartbeat detection in the car.

Currently, four types of devices, namely pressure sensors, accelerometers, gyroscopes, and flow sensors, account for 99% of automotive MEMS systems. Its five-year growth rate is 3-12%. MEMS pressure sensors are the most widely used sensors in automobiles. The price of MEMS pressure sensors for automobiles is about 5-7 dollars. In the automotive sector, MEMS pressure sensor operating revenue is expected to reach 1.26 billion U.S. dollars in 2013, accounting for 74% of the total industrial operating revenue for the year. At least 18 automotive applications will promote the growth of pressure sensors, including: tire pressure, brake sensors in electronic stability control systems, side airbags, engine control associated with increasingly stringent emission standards, atmospheric pressure and exhaust gas recirculation pressure.

In terms of sales, the top five automotive MEMS applications are ranked in descending order: ESC, airbag, intake manifold absolute pressure (MAP), TPMS and rollover detection.

Global Automotive MEMS Revenue Forecast (USD 1 Million)

Overall, China will remain the third largest automotive MEMS sensor user in the world from 2010 to 2015, ahead of Japan and many countries listed in other regions. North America will continue to be ranked first and Europe will be ranked second. It is expected that overall automotive MEMS sales will reach 3 billion U.S. dollars in 2015, up 25% from the 2.4 billion U.S. dollars in 2012. China's automotive MEMS sensors are far faster than the average global growth rate. In 15 years, China's auto MEMS sales will grow to 387.9 million U.S. dollars, compared with 194.3 million U.S. dollars in 2010.

MEMS sensor manufacturers for automotive electronics analysis:

Revenue from the Top 10 Automotive MEMS Sensor Suppliers in 2012 (in millions of US dollars)

As shown in Table 1, Bosch's 2012 automotive MEMS operating revenues were as high as $625 million, far ahead of the second-placed Denso of US$296 million. The total revenue of the top 10 manufacturers was 2.1 billion U.S. dollars. Last year, the overall automotive MEMS industry revenue was 2.3 billion U.S. dollars, and the total share of the top 10 manufacturers was nearly 94%. Therefore, the automotive MEMS industry concentration is very high. There is no manufacturer from China.

Bosch's success in automotive MEMS sensors is not only due to its high technological level and wide product line. It is not only the largest supplier of pressure sensors, but also the number one supplier of low-voltage MEMS, especially in the electronic stability control (ESC) system. In the field, the company is a major supplier of accelerometers, gyroscopes, and pressure sensors. To comply with the trend, the accelerometer is packaged with a gyroscope (combined sensor) to reduce the overall cost of ESC system manufacturers.

Consumer Electronic MEMS Sensors:

With the rapid development of consumer electronics and product innovation, especially with the rapid development of smart phones and flat panels, consumer electronics has replaced the automotive sector as the largest application market for MEMS.

Global MEMS Market for Smartphones and Tablets

Applications for MEMS sensors in consumer electronics include motion/fall detection, navigation data compensation, game/human interface, power management, GPS enhancement/blind zone elimination, velocity/distance counting, etc., which make its penetration far more than traditional On the semiconductor chips, these MEMS technologies have greatly improved the user experience. In all fields, the mobile phone is the largest application area of ​​MEMS. The most widely used sensors are accelerometers, gyroscopes, and MEMS silicon microphones, where the accelerometer is the largest application in the market. The recent rapid growth of gyroscopes has become the second largest application after accelerometers. Sales of MEMS microphones have reached nearly one billion U.S. dollars in 2014. IHS stated that the global MEMS microphone market will continue to maintain a compound annual growth rate (CAGR) of 18% for five consecutive years. There are also some MEMS sensors that are in the R&D stage or have just entered the market, such as magnetometers, fingerprint sensors, environmental sensors, MEMS phone cameras, and so on.

China's MEMS Sensor Industry Policy Support

MEMS sensors belong to the integrated circuit industry. The central and local governments have begun to focus on supporting the integrated circuit (chip) industry, which is unprecedented in terms of funding size and supportive thinking.

1. On March 5, Premier Li Keqiang mentioned the integrated circuit (chip) industry for the first time in the government work report at the two sessions this year.

2. On March 4th, Shanghai Economic and Information Technology Commission initiated special awards for IC designers. In addition, Jiangsu, Shenzhen and other provinces and cities may all introduce billions of industrial funds after the two sessions, and the government will take the lead to absorb social capital.

3. In June 2014, the State Council issued and issued the Outline of the National Integrated Circuit Industry Development Promotion.

4. On April 23, 2014, the state established a 120 billion yuan national chip industry support fund.

to sum up:

1. MEMS sensors have many advantages over traditional sensors and are widely used in consumer electronics, healthcare, and automotive industries.

2. Since the MEMS sensor industry has as many as 10,000 kinds of products, R&D investment is too large, and sales of single products are difficult to increase, so only big companies can make profits.

3, MEMS sensors have been widely used in consumer electronics, automotive industry, health care, robotics and automation industries, space satellites, launch vehicles, aerospace equipment and other fields, of which consumer electronics has become the largest MEMS sensor In the application market, global sales reached US$3 billion in 2014.

4. The total revenue of the top ten MEMS sensor manufacturers in the automotive sector was US$2.1 billion. Last year, the overall automotive MEMS industry operating revenue was US$2.3 billion, and the top ten manufacturers’ total share was close to 94%. The concentration was very high. This is because the safety performance required for use on automobiles is high, and only a few manufacturers can meet the requirements.

5. Consumer electronics is the largest application market for MEMS. The Yole Developpement research report predicts that between 2013 and 2018, the global MEMS consumer sensor market will grow at a compound annual growth rate of 18.5%, reaching US$6.4 billion by 2018. The relatively low concentration of manufacturers is due to the lower requirements of consumer MEMS sensors.

6. The market size of MEMS sensors in 2014 reached US$13 billion. It is expected that by 2018, the MEMS market output value will grow at a CAGR of 12% to 13% to US$22.5 billion, and unit shipments will reach 2.35 billion.

7. The application of MEMS sensors in low-end consumer electronics is also very large. For example, some low-end mobile phones and wearable devices, there is still a gap between China's MEMS sensors and international companies, and the future of Chinese MEMS companies is in the low-end consumer market. Still have the opportunity.

8. The state’s policy support for the MEMS sensor industry is very strong.

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